卷对卷石墨烯连续生长设备

所属分类：PECVD系统
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发布日期：2020/03/09
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在线询价

详细介绍

主要特点

Main feature

Ø Under the vacuum condition , a RF power supply acts on the rare gas in the vacuum chamber to form the plasma equivalent glow effect ( PECVD patent of our company ) , and the field energy of the plasma replaces the thermal energy , so that the growth temperature of the graphene is reduced , and the process conditions are improved .

该设备在真空条件下，通过射频电源作用于真空腔室内的稀薄气体，形成等离子体等效辉光作用下（本公司PECVDzhuanli），利用等离子体的场能部分代替了热能，从而降低石墨烯生长温度，改善工艺条件。

Ø Achieve growth of high quality graphene thin films by controlling nucleation and growth of graphene

通过对石墨烯成核与生长的调控实现高品质石墨烯薄膜生长

Ø In this method, copper foil is used as a base, motor drives copper foil to move under closed growth condition, and then it passes through the first temperature zone (annealed area). Graphene will deposit on the copper foil on the second, third temperature zone (growth area)and tighten to the roll by the cooling device 该方法使用铜箔作为基底，电机带动铜箔在密闭生长条件下运动，经过第一温区（退火区）处理后的铜箔；在第二、第三温区（生长区）石墨烯将沉积在铜箔上，并通过冷却装置后收紧成卷。

Ø With the advantages of rapid cooling and continuous growth, and can be used for large-scale growth of graphene with large area and high quality.

相对于现有技术具有快速冷却、连续生长的优点，可以进行大面积、高质量石墨烯的规模化生长。

技术参数

Voltage

输入电源

· Furnace input AC 208-240V ，50/60 Hz

输入电压 110V/220V 50/60 HZ

Power

功率

6KW

Working Temperature

工作温度

· Max. Temperature: 1200 °C (< 1 hr)

最高温度：1200℃(< 1 hr)

· Continuous working temperature: 1100 °C

持续工作温度：1100℃

Heating Zone

加热区

· Heating Zone Length: 7.87" ( 200+200+200mm)

加热区长度：7.87”( 200+200+200mm)

· Constant Temperature Zone: 15.74 " (400mm. +/- 1ºC )

恒温区长度：15.74 " (400mm. +/- 1ºC )

Heating Elements

加热元件

· Fe-Cr-Al Alloy doped by Mo

电阻丝（掺钼铁铬铝合金）

Processing Tube

炉管

· High purity quartz tube: 100 mm OD x 1700 mm Length

石英管：100（外径）*1700（长）mm

Copper foil width

铜箔基底宽度

≤80mm

Copper foil running rate

铜箔前行速度

8cm/min---50cm/min 可调

Adjustable

RF Signal frequency

射频信号频率

13.56MHz±0.005%W

Power output

功率输出范围

0-500W

Vacuum Dgree

真空度

10-1Pa

Dimensions

尺寸

280*60*130cm

Warranty

质保

One year limited warranty with lifetime support (Consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.)

一年质保终身支持（消耗品如炉管，O型圈不在质保范围内）

Application Note

应用

· Equipped with high precision mass flowmeter in the gas system,can control the gas flow

气路系统内部装有高精度质量流量计可准确的控制气体流量

· Gas can mix sufficient in required proportion in the static mixing chamber,

设静态混气室，有助于气体充分混合，按要求配比

· Can match R-T-R laminating & stripping equipment as below:

配套石墨烯卷对卷覆膜、剥离设备如下图

Details

细节图片

· Overall structure